CVD金刚石膜生长过程的Raman分析

RAMAN ANALYSIS ON GROWTH PROCESS OF CVD DIAMOND FILMS

摘要: 采用激光Raman散射分析法对CVD金刚石膜的生长过程进行研究,讨论在金刚石膜生长的不同阶段,膜内金刚石和非金刚石成分的相对含量及其残余应力的变化情况。

Abstract: Laser Raman analyes was carried out to investigate the growth process of CVD diamond films.By Raman spectroscopy,the variation of the relative contents of the diamond and non-diamond carbon phases was discussed,and the residual stresses in the diamond films at different growth stages were estimated.