提高金刚石膜电阻率的几种方法

SEVERAL METHODS FOR IMPROVING THE RESISTIVITY OF DIAMOND FILMS

摘要: 金刚石膜的电阻率是衡量金刚石膜性能的一个重要指标。由于各种因素的影响,沉积后的金刚石膜的电阻率比较低,还达不到实用要求,需要通过处理加以提高。介绍了几种后处理方法,并对其优缺点进行了比较。

Abstract: The resistivity of diamond film is an important index for evaluation of its characteristics.The resistivity of as deposited films is fairly low,it can not meet the demond for application,and must be improved by post treatments.Several treatment methods are introduced here,their advantages and disadvantages are compared.