微机电系统的加工技术及其研究进展

FABRICATION TECHNIQUE OF MICRO ELECTRO MECHANICAL SYSTEMS AND ITS RESEARCH PROGRESS

摘要: 简要介绍微机电系统中的微机械加工技术,主要包括硅表面微加工技术、硅体微加工技术、光刻及电铸和复制技术(LIGA)、准LIGA技术和快速成型技术等,并综述了这些技术的研究进展情况。

Abstract: The microfabrication technique of Micro Electro Mechanical Systems（MEMS） is concisely introduced, which mainly includes micromachining techniques for silica surface and silica body, photolithograph, electroform, LIGA technique, quasi LIGA technique and rapid prototyping technique. The research progress of these techniques is also described.