(Pb1-xSrx) TiO3铁电薄膜电滞回线的测试分析
FABRICATION AND HYSTERESIS LOOPS PROPERTY OF(Pb1-xSrx) TiO3 FERROELECTRIC THIN FILMS
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摘要: 采用磁控溅射法制备了PST薄膜,讨论了其制备工艺并着重对其电滞回线进行了测试分析。从测试结果来看,其饱和极化强度PS典型值为19.0 μC/cm2,剩余极化强度为6.6 μC/cm2,矫顽场强为16 kV/cm,热释电系数为10-4量级。表明所制备的PST薄膜具有较好的铁电性能。Abstract: The（Pb1-xSrx）TiO3 thin films were prepared by magneticsputtering technology.The hysteresis loo ps property of PST thin films was measured and analyzed.The saturated polarization intensity,the residual polarizat ion intensity and the coercive electric field of the PST sample were about 19.0 μC/cm2,6.6 μC/cm2 and 16 kV/cm,respectively.The pyroelectric coefficient was in 10-4 order.
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